Atmospheric pressure diffuse plasma in ambient air for ITO surface cleaning

作者：Homola Tomas^*; Matousek Jindrich; Medvecka Veronika; Zahoranova Anna; Kormunda Martin; Kovacik Dusan; Cernak Mirko

来源：Applied Surface Science, 2012, 258(18): 7135-7139.

DOI：10.1016/j.apsusc.2012.03.188

• Atmospheric diffuse plasma
• DCSBD
• Filament-free plasma
• ITO surface
• Cleaning
• XPS

Effects of atmospheric filament-free diffuse plasma in ambient air and oxygen by Diffuse Coplanar Surface Barrier Discharge (DCSBD) on surface of indium tin oxide (ITO) were studied. The DCSBD plasma treatment resulted in significant reduction of water contact angles (even for 1 s long treatment). The decrease can be explained by the chemical changes on surface. These were studied by XPS which shows considerable decrease in the carbon surface concentration. The detailed analysis of C1s peak indicates the increase of the highest binding energy component of the C1s peak that corresponds to polar bonds with oxygen, which may be also related to decrease of water contact angle. AFM measurement showed no significant effect of plasma on ITO surface morphology.

• 出版日期2012-7-1