MEMS-based carbon nanotube and carbon nanofiber Cu micro special electric contact

作者：Deng, Min^*; Ding, Guifu; Wang, Yan; Wang, Yuchao; Wang, Hong; Fu, Shi

来源：Journal of Micromechanics and Microengineering, 2009, 19(6): 065001.

DOI：10.1088/0960-1317/19/6/065001

• POLYIMIDE COMPOSITES
• MATRIX COMPOSITES
• THERMAL-EXPANSION
• RESISTANCE
• COATINGS

Two new electrical contact materials, carbon nanotube (CNT) and carbon nanofiber (CNF), Cu-matrix composite films are prepared by composite electroplating. The microstructure, morphology and physical performance of Cu-CNT/CNF composite films were analyzed by a scanning electron microscope, a Vickers hardness tester and a semiconductor parameter analyzer. The scanning electron microscope images showed that the CNTs/CNFs were dispersed uniformly and combined well in the Cu matrix. Furthermore, the Cu-CNT/CNF composite films show relatively good physical properties, for example the hardnesses of Cu/CNT and Cu/CNF composite films are 156 HV and 207 HV, about 13.9% and 51.1% higher than that of the pure copper plating film (137 HV); the resistivities of CNT/CNF composite plating films are 2.656 x 10(-6) Omega cm and 1.815 x 10(-6) Omega cm, lower than those of other Cu-matrix composites such as CuW, 4.35 x 10(-6) Omega cm, and CuMo, 3.571 x 10(-6) Omega cm. In addition, CNT and CNF Cu micro special electric contacts have been designed and successfully fabricated by MEMS technology. The arc-erosion behavior of Cu/CNT and Cu/CNF contacts has been examined on an electric arc-erosion apparatus. The test result shows that the arc-erosion losses of Cu/CNT and Cu/CNF contacts are 2.7 mg and 3.0 mg, 22.9% and 14.3% lower than that of pure Cu (3.5 mg) under the same condition.

• 出版日期2009-6
• 单位上海交通大学