A new approach for 3D reconstruction from bright field TEM imaging: Beam precession assisted electron tomography

作者：Rebled J M; Yedra Ll; Estrade S; Portillo J; Peiro F^*

来源：Ultramicroscopy, 2011, 111(9-10): 1504-1511.

DOI：10.1016/j.ultramic.2011.06.002

• Electron beam precession
• Electron tomography
• Diffraction contrast
• Transmission electron microscopy
• Defects

The successful combination of electron beam precession and bright field electron tomography for 3D reconstruction is reported. Beam precession is demonstrated to be a powerful technique to reduce the contrast artifacts due to diffraction and curvature in thin foils. Taking advantage of these benefits, Precession assisted electron tomography has been applied to reconstruct the morphology of Sn precipitates embedded in an Al matrix, from a tilt series acquired in a range from +49 degrees to -61 degrees at intervals of 2 degrees and with a precession angle of 0.6 degrees in bright field mode. The combination of electron tomography and beam precession in conventional TEM mode is proposed as an alternative procedure to obtain 3D reconstructions of nano-objects without a scanning system or a high angle annular dark field detector.

• 出版日期2011-9