Atom probe microscopy of three-dimensional distribution of silicon isotopes in Si-28/Si-30 isotope superlattices with sub-nanometer spatial resolution

作者：Shimizu Yasuo^*; Kawamura Yoko; Uematsu Masashi; Itoh Kohei M; Tomita Mitsuhiro; Sasaki Mikio; Uchida Hiroshi; Takahashi Mamoru

来源：Journal of Applied Physics, 2009, 106(7): 076102.

DOI：10.1063/1.3236673

Laser-assisted atom probe microscopy of 2 nm period Si-28/Si-30 isotope superlattices (SLs) is reported. Three-dimensional distributions of Si-28 and Si-30 stable isotopes are obtained with sub-nanometer spatial resolution. The depth resolution of the present atom probe analysis is much higher than that of secondary ion mass spectrometry (SIMS) even when SIMS is performed with a great care to reduce the artifact due to atomic mixing. Outlook of Si isotope SLs as ideal depth scales for SIMS and three-dimensional position standards for atom probe microscopy is discussed.

• 出版日期2009-10-1