Diagnosis of hydrogen anions (H-, H-3(-)) from the near-electrode region of dielectric-barrier-discharge plasmas

作者：Wang WC; Xu Y^*; Wang WG; Zhu AM

来源：Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films , 2005, 23(1): 142-145.

DOI：10.1116/1.1839896

Hydrogen anions (H-,H-3) from the near-ground-electrode region in dielectric barrier discharge hydrogen plasmas were characterized using a molecular-beam mass spectrometer under the pressure of 1.5-60 Torr. The measured H- current is more than one to a few orders of magnitude greater than that of H-3(-) at pressure of 1.5-7.6 Torr with a peak-to-peak voltage of 40 kV and a 35 kHz ac power source. At the gas pressure range of 7.6-60 Torr, only the H- ionic signal is observed. The hydrogen-ion currents rise with the increasing of discharge voltage and ac frequency, but exhibit a maximum over the H-2 pressure range studied. The dominant formation mechanism for the H- and H-3. anions in the alternative and temporary cathode sheath near the discharge electrode has been discussed. The dependence of the mean energy of H- and H-3(-) anions on H-2 pressure has been also 3 obtained.

• 出版日期2005-2
• 单位大连理工大学