A multilevel polymer process for direct encapsulation of fluids in microfluidic systems

作者:Bossuyt Remy; Mazenq Laurent; Conedera Veronique; Ballet Jerome; Gue Anne Marie; Cano Jean Paul; Camon Henri*
来源:Microsystem Technologies, 2012, 18(2): 175-182.
DOI:10.1007/s00542-011-1381-0

摘要

This paper describes a polymer manufacturing technique for the realization of sealed liquid tanks with a high filling ratio. It is based on a lithographic process combined with lamination and can be performed on any type of substrate: Si, glass or polymer films. We demonstrated the encapsulation of solvents or inks in multilevel tanks on large surface area (>118 cm(2)) without any damage of the stored liquid. This micro-fabrication technology proposes a significant breakthrough for micro-fluidic applications. We propose a one step process for the filling and sealing of tanks which are performed simultaneously. Tanks can be integrated at any level in the micro-fluidic system with a perfect filling rate and an excellent tightness.

  • 出版日期2012-2

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