A Collective Laser Thomson Scattering System for Diagnostics of Laser-Produced Plasmas for Extreme Ultraviolet Light Sources

作者：Tomita Kentaro^*; Nakayama Kazuki; Inoue Kazuya; Sunahara Atsushi; Uchino Kiichiro

来源：Applied Physics Express, 2013, 6(7): 076101.

DOI：10.7567/APEX.6.076101

To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (n(e)) and electron temperature (T-e). Plasmas having parameters necessary for an EUV light source (n(e) = 10(24)-10(25) m(-3), T-e = 30-50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

• 出版日期2013-7