A novel MEMS inertial switch with a reinforcing rib structure and electrostatic power assist to prolong the contact time

作者：Li, Jian; Wang, Yan^*; Yang, Zhuoqing; Ding, Guifu; Zhao, Xiaolin; Wang, Hong

来源：19th Annual Conference and 8th International Conference of Chinese Society of Micro/Nano Technology (CSMNT), 2017-10-26 To 2017-10-29.

DOI：10.1088/1742-6596/986/1/012011

• Acceleration monitoring
• Dynamic displacements
• Fabricated device
• Finite element simulations
• ITS applications
• Low-power consumption
• Moving electrodes
• Vibration testing

The MEMS inertial switch is widely used in various industries owing to its advantage of small size, high integration, low power consumption and low costs, especially in the timing of Internet of things, such as toys, handheld devices, accessories and vibration testing. This paper provided a novel inertial switch with a reinforcing rib structure and electrostatic power assist. The designed inertial switch can reduce the complexity of the post-processing circuit and broaden its application prospect. The continuous electrostatic force can extend the contact time of the designed inertia switch before the leakage of electricity ends. The moving electrode with a reinforcing rib structure can effectively restrain the bending of the lower surface of moving electrode caused by residual stress. The array-type fixed electrode can ensure stable contact between the electrodes when the device is sensitive to external shocks. The dynamic displacement-time curve can be simulated by the COMSOL finite element simulation software. The laminated plating process is used to produce the designed inertial switch and the drop hammer acceleration monitoring system is used to test the fabricated device. The results indicate that, compared with the traditional design, the bouncing phenomenon can be prevented and extend the contact time to 336 mu s.

• 出版日期2018
• 单位上海交通大学