Aperiodic normal-incidence antimony-based multilayer mirrors in the 8-13-nm spectral range

作者：Vishnyakov E A^*; Luginin M S; Pirozhkov A S; Ragozin E N; Startsev S A

来源：Quantum Electronics, 2011, 41(1): 75-80.

DOI：10.1070/QE2011v041n01ABEH014383

• soft X-ray range
• antimony-based multilayer mirrors
• aperiodic structures
• normal incidence of radiation

The optical properties of several materials were analysed from the standpoint of fabrication of broadband normal-incidence multilayer mirrors possessing maximal uniform reflectivity in the 8 - 13-nm range. By solving the inverse problem of multilayer optics we show that aperiodic Sb/(B4C,Sc,Si) multilayer structures optimised for maximum uniform reflectivity in the 8 - 13-nm range are able to afford a normal-incidence reflectivity R similar to 10% throughout this range. The best results are exhibited by the pair Sb/B4C, for which the average reflection coefficient amounts to about 13%. The dependence of optimisation result on the program-mable limitation on the minimal layer thickness in the multilayer structure was numerically investigated. An empirical rule was established where by setting the lower bound for a layer thickness at a level similar to lambda(min)/4 (in this case, lambda(min) = 8 nm) does not result in an appreciable lowering of attainable uniform reflectivity.

• 出版日期2011