Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe

作者：Jain S K^*; Senecha V K; Naik P A; Hannurkar P R; Joshi S C

来源：Pramana - Journal of Physics, 2013, 81(1): 157-167.

DOI：10.1007/s12043-013-0545-0

• Electron cyclotron resonance plasma
• Langmuir probe
• electron density
• electron temperature

Electron cyclotron resonance (ECR) plasma was produced at 2.45 GHz using 200-750 W microwave power. The plasma was produced from argon gas at a pressure of 2 x 10 (-aEuro parts per thousand 4) mbar. Three water-cooled solenoid coils were used to satisfy the ECR resonant conditions inside the plasma chamber. The basic parameters of plasma, such as electron density, electron temperature, floating potential, and plasma potential, were evaluated using the current-voltage curve using a Langmuir probe. The effect of microwave power coupling to the plasma was studied by varying the microwave power. It was observed that the optimum coupling to the plasma was obtained for similar to 600 W microwave power with an average electron density of similar to 6 x 10(11) cm (-aEuro parts per thousand 3) and average electron temperature of similar to 9 eV.

• 出版日期2013-7