Analysis of femtosecond laser surface patterning on bulk single-crystalline diamond

作者：Lee Graham C B; Su Shi; Li Jiangling; Sugden Kate; Roohpour Nima; Yan Haixue; Ye Haitao^*

来源：Journal of Experimental Nanoscience, 2012, 7(6): 662-672.

DOI：10.1080/17458080.2012.724181

• single-crystalline diamond
• femtosecond laser patterning
• graphitic
• microstructures
• MEMS

Preliminary work is reported on 2-D and 3-D microstructures written directly with a Yb:YAG 1026 nm femtosecond (fs) laser on bulk chemical vapour deposition (CVD) single-crystalline diamond. Smooth graphitic lines and other structures were written on the surface of a CVD diamond sample with a thickness of 0.7 mm under low laser fluences. This capability opens up the opportunity for making electronic devices and micro-electromechanical structures on diamond substrates. The fabrication process was optimised through testing a range of laser energies at a 100 kHz repetition rate with sub-500 fs pulses. These graphitic lines and structures have been characterised using optical microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy and atomic force microscopy. Using these analysis techniques, the formation of sp(2) and sp(3) bonds is explored and the ratio between sp(2) and sp(3) bonds after fs laser patterning is quantified. We present the early findings from this study and characterise the relationship between the graphitic line formation and the different fs laser exposure conditions.

• 出版日期2012
• 单位Queen Mary University of London; Queen Mary,University of London; Queen Mary, University of London