An AFM/STM multi-mode nanofabrication approach allowing in situ surface modification and characterisation

作者：Hu Weihua^*; Bain J; Ricketts D

来源：MICRO %26 NANO LETTERS, 2013, 8(1): 43-46.

DOI：10.1049/mnl.2012.0859

A report is presented on a new multi-mode nanofabrication method that uses a compliant conductive atomic force microscope (AFM) probe for both AFM and scanning tunnelling microscope (STM) operation and it is demonstrated that these modes can be switched %26apos;on-the-fly%26apos; during the measurement or fabrication of nanostructures. The authors oxidised Ti with the same conductive AFM probe in AFM and STM modes, alternately in a continuous writing step. An in-plane Ti-TiOx-Ti junction was fabricated by combining AFM and STM modes and electrically characterised by taking current images in conductive AFM mode. After measurement, additional features were written to increase the electrical isolation, thus realising in situ nanoscale modification.

• 出版日期2013-1