Effect of variation of precursor concentration on structural, microstructural, optical and gas sensing properties of nanocrystalline TiO2 thin films prepared by spray pyrolysis techniques

作者：Patil Lalchand A^*; Suryawanshi Dinesh N; Pathan Idris G; Patil Dhanashri G

来源：Bulletin of Materials Science, 2013, 36(7): 1153-1160.

DOI：10.1007/s12034-013-0597-2

• Spray pyrolysis
• nanocrystalline TiO2
• electron diffraction pattern

The objective of the present paper is to investigate the effect of variation of precursor concentration (0 center dot 01, 0 center dot 02 and 0 center dot 03 M) on the structural, microstructural, optical and gas sensing properties of TiO thin films. Titanium dioxide (TiO) films were prepared from aqueous solution of titanium chloride (TiCl6HO, 99 center dot 9% pure, Merck made, Germany) onto the glass substrates heated at a temperature of 350 A degrees C by the spray pyrolysis technique. Bandgap energy of the films vary from 3.28 to 3.29 eV. X-ray diffraction shows that films to be nanocrystalline with anatase phase having tetragonal crystal structure. The d values calculated from electron diffraction patterns (TEM) were observed to be matching with d values calculated from XRD. Transmission electron microscopy (TEM) reveled that grain sizes were observed to increase (10-29 nm) with an increase in the concentration of precursor solution. The gas sensing performance of the films was tested.

• 出版日期2013-12