Micro-contacting of single and periodically arrayed columnar silicon structures by focused ion beam techniques

作者：Friedrich F^*; Herfurth N; Teodoreanu A M; Sontheimer T; Preidel V; Rech B; Boit C

来源：Applied Physics Letters, 2014, 104(24): 242104.

DOI：10.1063/1.4883642

Micron-sized, periodic crystalline Silicon columns on glass substrate were electrically contacted with a transparent conductive oxide front contact and a focused ion beam processed local back contact. Individual column contacts as well as arrays of >100 contacted columns were processed. Current-voltage characteristics of the devices were determined. By comparison with characteristics obtained from adapted device simulation, the absorber defect density was reconstructed. The contacting scheme allows the fabrication of testing devices in order to evaluate the electronic potential of promising semiconductor microstructures.

• 出版日期2014-6-16