Accurate displacement field measurement with scanning electron microscopy imaging

作者：Arikawa T; Murasawa G^*; Yoneyama S

来源：The Journal of Strain Analysis for Engineering Design, 2011, 46(5): 337-346.

DOI：10.1177/0309324711405751

• digital image correlation
• scanning electron microscopy
• displacement field
• noise
• drift

This study was undertaken to measure the displacement field accurately by application of digital image correlation (DIG) to scanning electron microscopy (SEM) images. First, a method of removing the noise and drift that arise in SEM images is proposed. Second, a compact slide machine is fabricated. Third, a translation test is performed under optical microscopy and SEM using the slide machine. Then a displacement field calculation is performed using the proposed image analysis method. The results show that the proposed method is adequate for the application of DIG to SEM images.

• 出版日期2011-7