Application of a focused ion beam to prepare electron microscopy samples of surface nanostructures

作者：Volkov R L^*; Borgardt N I; Kukin V N; Prikhod'ko A S; Basaev A S; Shaman Yu P

来源：Journal of Surface Investigation-X-Ray Synchrotron and Neutron Techniques, 2011, 5(5): 900-904.

DOI：10.1134/S1027451011090151

Carbon nanotubes grown on a silicon substrate with an array of FeNiCo20 catalyst islands are studied using focused ion beam and transmission electron microscopy. A method for preparing cross-sectional samples is proposed, which makes it possible to exclude the destructive effect of the ion beam on surface nanostructures during sample preparation using a microscopic three-dimensional protective barrier.

• 出版日期2011-10