a-S:H TFT-Silicon Hybrid Low-Energy X-Ray Detector

作者：Shin Kyung Wook; Karim S Karim^*

来源：IEEE Transactions on Electron Devices, 2017, 64(4): 1624-1629.

DOI：10.1109/TED.2017.2671365

• Silicon radiation detectors
• thin film transistors
• X-ray image sensors

Direct conversion crystalline silicon X-ray imagers are used for low-energy X-ray photon (4-20 keV) detection in scientific research applications such as protein crystallography. In this paper, we demonstrate a novel pixel architecture that integrates a crystalline silicon X-ray detector with a thin-film transistor amorphous silicon pixel readout circuit. We describe a simplified two-mask process to fabricate a complete imaging array and present preliminary results that show the fabricated pixel to be sensitive to 5.89-keV photons from a low activity Fe-55 gamma source. This paper presented can expedite the development of high spatial resolution, low cost, direct conversion imagers for X-ray diffraction and crystallography applications.

• 出版日期2017-4