科研之友
微信
新浪微博
Facebook
分享链接
摘要
This paper presents an experimental study of using dual-layer ultrathin films with a high refractive index and low refractive index to approximate a single-layer thin film with an equivalent intermediate refractive index, which is the basis of the functional graded refractive index thin film stack using dual-layer ultrathin films. Using ion beam deposition, five sets of ultrathin films of titanium dioxide (TiO2) and aluminium oxide (Al2O3) are deposited on silicon with different volume fractions and characterized by spectroscopic ellipsometer for the ordinary/extraordinary refractive index and by spectrophotometer for the reflectance. By designing the sequence of TiO2 and Al2O3 ultrathin films, the measured results show a good agreement between the experiments and simulation of the equivalent birefringent thin film. An application example of using the TiO2 and Al2O3 dual-layer ultrathin films to approximate a single-layer antireflection coating for silicon is presented.
- 出版日期2015-3
