Analysis of Hundreds of Time Constant Ratios and Amplitudes of Random Telegraph Signal with Very Large Scale Array Test Pattern

作者：Fujisawa Takafumi^*; Abe Kenichi; Watabe Shunichi; Miyamoto Naoto; Teramoto Akinobu; Sugawa Shigetoshi; Ohmi Tadahiro

来源：Japanese Journal of Applied Physics, 2010, 49(4): 04DC06.

DOI：10.1143/JJAP.49.04DC06

Random telegraph signal (RTS) noise shows discrete and stochastic switching in two or more states at a drain current or threshold voltage. The capture and emission of carriers in individual traps near a silicon-gate insulator film interface induce RTS noise phenomena. RTS noise has become a crucial problem in analog devices and other devices. To suppress RTS noise, it is necessary to determine the energy level of traps. Time constant ratio has a strong relationship with the energy level of traps in gate insulator films. In this paper, we extract a large number of RTS data sets with large-scale array test patterns and evaluate the gate-bias voltage dependences of time constant ratio and amplitude. We demonstrate that the energy level of traps distributes uniformly at a drain current of at least 0.1-1.0 mu A.

• 出版日期2010