An "ohmic-first" self-terminating gate-recess technique for normally-off Al2O3/GaN MOSFET

作者:Wang Hongyue; Wang Jinyan; Li Mengjun; He Yandong; Wang Maojun; Yu Min; Wu Wengang; Zhou Yang; Dai Gang
来源:Japanese Journal of Applied Physics, 2018, 57(4): 04FG05.
DOI:10.7567/JJAP.57.04FG05