Antireflection In2O3 coatings of self-organized TiO2 nanotube layers prepared by atomic layer deposition

作者：Macak Jan M^*; Prikryl Jan; Sopha Hanna; Strizik Lukas

来源：Physica Status Solidi-Rapid Research Letters, 2015, 9(9): 516-520.

DOI：10.1002/pssr.201510245

• TiO2 nanotubes
• In2O3
• antireflection coating
• atomic laser deposition
• light absorption

We report on the uniform anti-reflection coating of TiO2 nanotube layers with a secondary material - indium trioxide (In2O3) - by atomic layer deposition (ALD). We provide for the first time the detailed evidence of the ALD deposited coating inside nanotubes for three different tube layers with aspect ratio up to approximate to 80, which is so far the highest aspect ratio reported for ALD-processed self-organized anodic TiO2 nanotubes. We show that uniform In2O3 coating of the nanotubes strongly influences the overall reflectance of the layers due to intrinsic properties of In2O3.

• 出版日期2015-9