Development of fabrication process for aspherical neutron focusing mirror using numerically controlled local wet etching with low-pressure polishing

作者：Nagano M; Yamaga F; Zettsu N; Yamazaki D; Maruyama R; Soyama K; Yamamura K^*

来源：Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment , 2011, 634: S112-S116.

DOI：10.1016/j.nima.2010.06.253

• Neutron supermirror
• Local wet etching
• Ion beam sputtering
• Elliptical mirror
• Focusing

The aspherical supermirror is among the most useful optics to focus a neutron beam with a wide wavelength range. The improvement of surface roughness and enlargement of mirror size are essential for increasing the focusing gain. A highly efficient and high-precision fabrication process for the substrate of a large aspherical mirror combining conventional precision grinding, numerically controlled local wet etching (NC-LWE) figuring and low-pressure polishing was developed. Using this new fabrication process, a 400 mm-long plano-elliptical neutron focusing mirror substrate was successfully fabricated with a figure error of 0.39 mu m p-v and an rms surface roughness of less than 0.2 nm.

• 出版日期2011-4-1