Multi-orientation patterned deposition of BaTiO(3) thin films using an Au buffer layer

作者：Yang Yaodong^*; Yao Jianjun; Li Jiefang; Das Jaydip; Viehland D

来源：Thin Solid Films, 2010, 518(20): 5806-5809.

DOI：10.1016/j.tsf.2010.05.108

• Patterning
• Pulsed laser deposition
• Perovskite
• Nanoparticles
• Scanning electron microscopy
• Transmission electron microscopy
• X-ray diffraction
• Crystallographic orientation

The control of crystallographic orientation for ferroelectric oxide thin films grown on single crystal substrates has been investigated. We find that perovskite BaTiO(3) has unusual orientation distributions when deposited on (100)- and (110)-oriented SrTiO(3) single crystal substrates that have predeposited patterned Au regions. BTO areas deposited on gold islands were found to have a (111) orientation, whereas those deposited directly on STO had the same orientation as the substrate. Based on this method, we can select, locate, and pattern an oxide film to have different orientation distributions, and thereby engineer films with the complete property anisotropy in-plane.

• 出版日期2010-8-2
• 单位美国弗吉尼亚理工大学(Virginia Tech)