Micropower thermoelectric generator from thin Si membranes

作者：Perez Marin A P; Lopeandia A F^*; Abad Ll; Ferrando Villaba P; Garcia G; Lopez A M; Munoz Pascual F X; Rodriguez Viejo J

来源：Nano Energy, 2014, 4: 73-80.

DOI：10.1016/j.nanoen.2013.12.007

• Low-dimensional Si
• Planar thermoelectric generator
• Power output
• Si membrane

We report the development of a Si-based micro thermogenerator build from silicon-on-insulator by using standard CMOS processing. Ultrathin single-crystalline Si membranes, 100 nm in thickness, with embedded n and p-type doped regions electrically connected in series and thermally in parallel, are active elements of the thermoelectric device that generate thermo-power under various thermal gradients. This proof-of-concept device produces an output power density of 4.5 mu W/cm(2), under a temperature difference of 5 K, opening the way to envisage integration as wearable thermoelectrics for body energy scavenging.

• 出版日期2014-3