Multi-component transparent conductive oxide films on polyimide substrate prepared by radio frequency magnetron sputtering

作者：Zhou YanWen^*; Liu Xi; Lu YunHua; Hu Zhizhi; Zhang ChaoKui; Wu FaYu

来源：Thin Solid Films, 2013, 544: 197-200.

DOI：10.1016/j.tsf.2013.03.122

• Multi-component TCO film
• Flexible organic transparent substrate
• RF magnetron sputtering
• PI

Multi-component tin, zinc and cadmium oxide (SnxZnyCd1-x-yO) transparent conductive oxide coatings with high transparency and charge carrier mobility were prepared on polyimide substrates by radio frequency magnetron sputtering from powder targets. The films were columnar in morphological, but with defects present. The microstructure was nano-crystalline for the film containing the highest Cd content, and a mixture of amorphous and nano-crystalline for other films. The average transmittance within the visible wavelength range improved from 70% to 90% with decreasing Cd or Sn content in the films. The charge carrier concentrations of the films were of the order of 10(16) cm(-3), and the highest mobility reached 31 cm(2)/V s. This initial study of SnxZnyCd1-x-yO films on polyimide substrates shows promise for applications, such as flexible thin film transistors.

• 出版日期2013-10-1
• 单位辽宁科技大学