摘要

A novel resonant cavity enhanced (RCE) photodetector with flat-top and steep-edge response is presented. The response is obtained by designing a gradient-thickness P area in the absorption cavity. Simulation results show that the maximum and minimum values of the quantum efficiency in bandpass are 85.242% and 87.564% respectively, the ripple is about 3.6%, and 0.5 dB, 3 dB and 20 dB bandwidths are 0.3 nm, 0.4 nm and 1.2 nm, respectively. The mesa area is 10 μm × 10 μm and the frequency response bandwidth is 87 GHz. Compared with similar photodetectors, this photodetector has high quantum efficiency, narrow spectral response linewidth, good flat-top and steep-edge response and ideal high-speed characteristics.