A novel method of using the OES line ratio to determine the spatially resolved atomic density in low-temperature plasmas and its application in carbon and aluminium atoms in capacitively coupled plasmas

作者：Li Jiang^*; Zhu Xi Ming; Pu Yi Kang

来源：Journal of Physics D: Applied Physics , 2011, 44(45): 455203.

DOI：10.1088/0022-3727/44/45/455203

A new optical emission spectroscopy (OES) line-ratio method is proposed to obtain spatially resolved atomic densities in low-temperature plasmas. Since the line ratio of two emission lines from the same upper level depends on the atomic densities in the lower levels due to radiation trapping, the spatially resolved atomic densities in the lower levels can be obtained from the relevant line ratios when a so-called mono-directional escape factor is used. The spatially resolved atomic densities of carbon atom in a CF(4) plasma and aluminium atom in an argon plasma are obtained using this method. According to their spatial profile, the production and loss mechanisms of these atoms are discussed.

• 出版日期2011-11-16
• 单位清华大学