Deposition and characterization of magnetic Ti-Fe-C nanocomposite thin films

作者：Wilhelmsson O; Bijelovic S; Lindquist M; Andre B; Wiklund U; Svedlindh P; Jansson U^*

来源：Thin Solid Films, 2010, 518(10): 2607-2616.

DOI：10.1016/j.tsf.2009.07.195

• Coatings
• Magnetic properties and measurements
• Tribology
• Physical vapour deposition (PVD)

Nanocomposite (Ti(1-x)Fe(x))C(y) films with different compositions have been deposited by dc magnetron sputtering at 450 degrees C. The sputtered films could dissolve as much as 20-30 at.% of Fe on the Ti sites which is far above the maximum solid solubility at equilibrium. The solubility was dependent on the carbon content and more carbon-rich films could dissolve more Fe without the formation of Fe-precipitates. The addition of Fe also reduced the grain size of the carbide particles. Upon annealing, alpha-Fe starts to precipitate and the amount and size of these precipitates can be controlled by the annealing procedure and from the total composition of the as-deposited films. Mechanical and tribological studies show that some compositions of the (Ti(1-x)Fe(x))C(y) films have very good wear-resistant properties. These results together with magnetization measurements suggest that Ti-Fe-C films can be used as a wear-resistant magnetic thin film material.

• 出版日期2010-3-1