Modification of poly(methyl methacrylate) by keV Ar deposition

作者：Su Ya Ting; Shan Tzu Ray; Sinnott Susan B^*

来源：Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms , 2009, 267(15): 2525-2531.

DOI：10.1016/j.nimb.2009.06.008

• PMMA
• Deposition
• Surface modification
• Argon bombardment
• Molecular dynamics simulation
• AIREBO potential

Classical molecular dynamics simulations are used to examine 1 keV Ar atom bombardment on the surface of poly(methyl methacrylate) (PMMA), which induces sputtering and chemical modifications to the surface. The simulations are carried out at various surface temperatures that range from 200 to 600 K. The results indicate that different fragments of PMMA, as characterized by their mass, are preferentially sputtered from the surface at the various temperatures considered. In addition, the simulations predict that small fragments are produced by the high energy deposition process. However, larger sized fragments are generated when the surface temperature is close to the glass transition temperature of PMMA. The atomic-scale processes by which these occur are elucidated by the simulations.

• 出版日期2009-8-1
• 单位清华大学