科研之友
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摘要
A simple displacement measurement based on the attenuated total reflection technique is proposed and experimentally demonstrated. By analyzing the fringe shift of the reflective pattern recorded on a CCD camera, a slight displacement, which corresponds to a change in the waveguide thickness, can be determined in real time with adequate accuracy. The measurement range of this method is about 240 mum, and its accuracy can reach 0.05 mum.
- 出版日期2004-4-26
- 单位上海交通大学
