Analysis of residual layer thickness of resin in an imprinting process using a soft mold

作者：Jang Siyoul^*; Lee Taek Kyoung; Lee Jae Gab

来源：Electronic Materials Letters, 2013, 9(5): 621-627.

DOI：10.1007/s13391-013-3034-1

• residual layer thickness (RLT)
• window open
• thin film elastohydrodynamic lubrication (EHL)
• elastic deformation
• mold rigidity

The selection of proper mold material for an imprinting process is important with respect to the manufacturing cost of the mold as well as the interfacial material mechanics between the resin and the mold. Among the various material characteristics of the mold, its rigidity is an influential factor for the distribution shape of the residual layer thickness (RLT) of the resin, and is therefore an important consideration for subsequent etching processes (window open processes) that remove the residual resin layer. In this work, variations in the RLT for a rectangular mold structure are simulated using thin film lubrication theory and compared with experimental results from an imprinting process.

• 出版日期2013-9