Abnormal Anodic Aluminum Oxide Formation in Confined Structures for Lateral Pore Arrays

作者：Oh Jihun^*; Thompson Carl V

来源：Journal of the Electrochemical Society, 2011, 158(3): C71-C75.

DOI：10.1149/1.3532778

We report on abnormal behavior in anodic oxidation of Al in mechanically confined structures for formation of horizontal nanoporous anodic alumina oxide (H-AAO). Instead of smooth pore walls, periodic dendrite inner pore structures form, the growth rate is suppressed to 5% of its value during bulk anodization under the same conditions, and a steady-state is never reached. These anomalies associated with H-AAO originate from suppressed volume expansion and a plastic flow of Al(2)O(3) confined by the SiO(2) hard mask. By determining new anodization conditions leading to zero volume expansion, dendritic H-AAO can be avoided and kinetic retardation minimized.

• 出版日期2011