Mechanical and electronic approaches to improve the sensitivity of microcantilever sensors

作者：Mutyala Madhu Santosh Ku; Bandhanadham Deepika; Pan Liu; Pendyala Vijaya Rohini; Ji Hai Feng^*

来源：Acta Mechanica Sinica, 2009, 25(1): 1-12.

DOI：10.1007/s10409-008-0222-6

• Microcantilever
• Sensor
• MEMS
• Sensitivity

Advances in the field of micro electro mechanical systems and their uses now offer unique opportunities in the design of ultrasensitive analytical tools. The analytical community continues to search for cost-effective, reliable, and even portable analytical techniques that can give reliable and fast response results for a variety of chemicals and biomolecules. Microcantilevers (MCLs) have emerged as a unique platform for label-free chem-sensor or bioassay. Several electronic designs, including piezoresistive, piezoelectric, and capacitive approaches, have been applied to measure the bending or frequency change of the MCLs upon exposure to chemicals. This review summarizes mechanical, fabrication, and electronics approaches to increase the sensitivity of MCL sensors.

• 出版日期2009-2