科研之友
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摘要
A sequential combination of thermal oxide growth, photolithography, buffered hydrogen fluoride (BHF) etch, sputter deposition and lift-off process were used to produce square-shaped nano-islands of gold and silica grid patterns on a doped silicon support. This nanofabricated surface was characterized by profilometry, optical microscopy, atomic force microscopy (AFM) and cyclic voltammetry (CV). The height difference between gold and silica was tailored to be similar to 35 nm. This kind of chip can be used as bio-sensors for detecting various metalloproteins grafted on gold islands, as well as caged analyte molecules inside the protein, from their corresponding electrochemical read-out.
- 出版日期2011-3
