Two-axis MEMS scanners with radial vertical combdrive actuators - design, theoretical analysis, and fabrication

作者：Tsai Jui Che^*; Chiou Sheng Jie; Hsieh Tien Liang; Sun Chia Wei; Hah Dooyoung; Wu Ming C

来源：Journal of Optics A: Pure and Applied Optics , 2008, 10(4): 044006.

DOI：10.1088/1464-4258/10/4/044006

• two-axis scanner
• radial combdrive actuators
• small form factor
• surface micromachining

We propose the employment of radial vertical combdrive actuators to implement two-axis micro-electro-mechanical systems (MEMS) scanners. The devices are designed based on a five-layer polysilicon surface micromachining process. A cross-bar spring structure consisting of lower and upper torsion springs is incorporated to achieve two rotational degrees of freedom, enabling the dual-axis rotation. Both the vertical combdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. Theoretical analysis is performed for comparison of various designs. Preliminary experimental results are also obtained.

• 出版日期2008-4