Nitrogen doped p-type SnO thin films deposited via sputtering

作者：Kim Y; Jang J H; Kim J S; Kim S D; Kim S E^*

来源：Materials Science and Engineering B-Solid State Materials for Advanced Technology, 2012, 177(16): 1470-1475.

DOI：10.1016/j.mseb.2012.01.011

• Tin oxide
• Sputtering
• Nitrogen

p-Type SnO thin films were fabricated via reactive RF magnetron sputtering on borosilicate substrates with an Sn target and Ar/O-2/N-2 gas mixture. The undoped SnO thin film consisted of a polycrystalline SnO phase with a preferred (101) orientation: however, with nitrogen doping, the preferred orientation was suppressed and the grain size decreased. The electrical conductivity of the undoped SnO thin films demonstrated a relatively low p-type conductivity of 0.05 Omega(-1) cm(-1) and it was lowered slightly with nitrogen doping to 0.039 Omega(-1) cm(-1). The results of the X-ray photoelectron spectroscopy suggested that the nitrogen doping created donor defects in the SnO thin films causing lower electrical conductivity. Lastly, both the undoped and doped SnO thin films had poor optical transmittance in the visible range.

• 出版日期2012-9-20