Multi-stage pulsed laser deposition of aluminum nitride at different temperatures

作者:Duta L; Stan G E; Stroescu H; Gartner M; Anastasescu M; Fogarassy Zs; Mihailescu N; Szekeres A; Bakalova S; Mihailescu I N
来源:Applied Surface Science, 2016, 374: 143-150.
DOI:10.1016/j.apsusc.2015.10.093
  • 出版日期2016-6-30