A silicon/indium arsenide source structure to suppress the parasitic bipolar-induced breakdown effect in SOI MOSFETs

作者：Abbasi Abdollah; Orouji Ali A^*

来源：Materials Science in Semiconductor Processing, 2013, 16(6): 1821-1827.

DOI：10.1016/j.mssp.2013.06.022

• MOSFET
• Drain breakdown
• Narrow bandgap
• Valence band
• And InAs

We introduce Silicon/indium arsenide (Si/InAs) source submicron-device structure in order to minimize the impact of floating body effect on both the drain breakdown voltage and single transistor latch in ultra thin SOI MOSFETs. The potential barrier of valence band between source and body reduces by applying the Indium Arsenide (InAs) layer at the source region. Therefore, we can improve the drain breakdown by suppressing the parasitic NPN bipolar device and the hole accumulation in the body. As confirmed by 2D simulation results, the proposed structure provides the excellent performance compared with a conventional SOI MOSFET thus improving the reliability of this structure in VLSI applications.

• 出版日期2013-12