Micro-Fabrication of Piezo-Composite Materials on the Flexible Substrates

作者：Shin Dong Jin; Koh Jung Hyuk^*

来源：Journal of Nanoscience and Nanotechnology, 2013, 13(9): 6321-6325.

DOI：10.1166/jnn.2013.7728

• MEMS
• PZT
• Micro-Pillar
• Flexible Energy Harvester

In this study, we have presented micro-scaled flexible energy harvesters fabricated by the Microelectromechanical systems (MEMS) process. The flexible energy harvesters were prepared by a pillar structure with a diameter size of 100 similar to 500 mu m. We will describe a micro-pattern of fine scale ceramic structures utilizing an SU-8 negative photoresist by standard UV lithography. SU-8 processing was developed to implement low-stress SU-8 structures as permanent and functional material incorporated with silicon-on-insulator technologies. The micro-patterns of fine scale (Pb, Zr) TiO3 ceramics of the pillar shape were prepared by this MEMS method. We have studied the micro-pattern of fine scale PZT pillar structures through scanning electron microscope (SEM) analysis and several analysis methods.

• 出版日期2013-9