Mechanical characterization of individual polycrystalline carbon tubes for use in electrical nano-interconnects

作者：Khiat A^*; Poelma R H; Zhang G Q; Heuck F; Tichelaar F D; Sarno M; Ciambelli P; Fontorbes S; Arurault L; Staufer U

来源：Microelectronic Engineering, 2012, 98: 317-320.

DOI：10.1016/j.mee.2012.07.087

• Polycrystalline carbon tubes
• CVD growth
• CNT without catalyst
• Mechanical characterization
• Electrostatic pull-in measurement

Polycrystalline carbon tubes were generated by CVD inside electrochemically prepared nano-porous anodic aluminium oxide membranes. This method produced nano-tubes without catalyst, featuring polycrystalline and a few layer thick walls. Individual tubes could be isolated and suspended on microfabricated substrates such that they formed single-side clamped beams. These beams were then used to investigate their mechanical properties employing electrostatic forces for bending the tubes beyond their mechanical stability where pull-in occurs, which could be detected by monitoring the current flowing from the tube to the substrate.

• 出版日期2012-10