A Foldable Microplasma-Generation Device on a Paper Substrate

作者:Hsu Cheng Che*; Tsai Jheng Han; Yang Yao Jhen; Liao Ying Chih; Lu Yen Wen
来源:Journal of Microelectromechanical Systems, 2012, 21(5): 1013-1015.
DOI:10.1109/JMEMS.2012.2196495

摘要

We report the fabrication of a plasma-generating device on a paper substrate. This device was fabricated using a screen print process. Plasmas were ignited between two parallel electrodes with a plasma gap of 237 to 710 mu m using a dc power source. We demonstrated that a stable helium plasma can be sustained when the substrate is flat, rolled, and folded along various orientations. When the plasma was ignited with a 0.2-mu L salt solution droplet with 1.4, 4.6, and 7.8 ng of Li, Na, and K respectively applied to the discharge gap, clear metallic emission lines emanated from the plasma. Our result demonstrates that this paper-based plasma device can be used in analytical applications.

  • 出版日期2012-10