Actuation of silicon pillar micro-mechanical resonators by Kelvin polarization force

作者：Toffoli Valeria^*; Dandash Fadlallah; Pozzato Alessandro; Borin Daniele; Carrato Sergio; Lazzarino Marco

来源：Microelectronic Engineering, 2013, 111: 1-6.

DOI：10.1016/j.mee.2013.05.013

• Pillar
• Resonators
• MEMS
• Kelvin
• Polarization

Pillars resonators arrays are emerging as powerful sensors for their peculiar characteristics, namely high mass sensitivity, high active areas density and operation in liquid. On the other hand, their characteristic vertical geometry and fabrication strategy hinders a direct integration within integrated circuits. So far, the examples reported in literature are based on a bulk piezoelectric actuation and optical lever detection, which are not suitable for further integration. In this paper we report on the design, fabrication and characterization of Kelvin polarization force actuated pillar resonator. This work represents the first step toward a full integration of pillars with on-chip electronic actuation and detection.

• 出版日期2013-11