Alignment of nanoparticles, nanorods, and nanowires during chemical vapor deposition of silicon

作者：Swain Bhabani Sankar; Park Jin Woo; Yang Seung Min; Mahmood Khalid; Swain Bibhu Prasad; Lee Jae Gab; Hwang Nong Moon

来源：Applied Physics A, 2015, 120(3): 889-895.

DOI：10.1007/s00339-015-9310-1

We fabricated silicon nanostructures (Si-NSs) on SiO (x) /Si substrate in chemical vapor deposition. During the synthesis of Si-NSs, Si sunflower-shaped structures of one to hundred microns were observed, therein the nanoparticles (NPs), nanowires, and nanorods were aligned in an ordered manner. We suggest that the NSs reported here are evolved by the electrostatic force exerted by charged NPs in gas phase. This NS would help in understanding the role of spontaneous charging of NPs in the gas phase and the role of charged NPs in the gas phase for NSs growth.

• 出版日期2015-9