Direct electrodeposition of copper ladder structures on a silicon substrate

作者:Wang, Ke; Niu, Lianping; Zong, Zhaocun; Zhang, Mingzhe*; Wang, Chen; Shi, Xinjing; Men, Yongfan; Zou, Guangtian
来源:Crystal Growth & Design, 2008, 8(2): 442-445.
DOI:10.1021/cg070200n

摘要

We report a copper electrodeposition with a microscopic structure of a regular ladder pattern on a silicon substrate where the ladder formation and evolution can be controlled by varying the electric field intensity during the electrodeposition. The deposit morphology varies from a periodic square-island structure to a ladder structure when the applied current is changed. The formation of a ladder structure with nanoparticles is related to the periodic potential measured across the electrodes. This method provides a deep insight into pattern formation in electrodeposition.