A General Procedure for the Design of Bulk Acoustic Wave Filters

作者：Catherinot Lise; Giraud Sylvain; Chatras Matthieu; Bila Stephane^*; Cros Dominique; Baron Thomas; Ballandras Sylvain; Estagerie Laetitia; Monfraix Philippe

来源：International Journal of RF and Microwave Computer-Aided Engineering, 2011, 21(5): 458-465.

DOI：10.1002/mmce.20550

• bulk acoustic wave (BAW)
• microwave filter
• filter synthesis
• LiNbO(3)

This article presents a procedure for the design of bulk acoustic wave (BAW) filters. The procedure consists of optimizing the modified Butterworth-Van Dyke model of each resonator, considering appropriate technological parameters. The approach is demonstrated first to design a classical aluminum nitride-based BAW filter but remains valid for other piezoelectric layers, considering either longitudinal or transverse acoustic wave coupling. The approach is finally applied to the design of a lithium niobate (LiNbO(3)) BAW filter for wide-band filtering applications.

• 出版日期2011-9