A Three-axis Translation Stage Using Opposing Wedges with Error Compensation

作者：Khim Gyungho^*; Ro Seung Kook; Park Jong Kweon; Ehmann Kornel

来源：International Journal of Precision Engineering and Manufacturing, 2012, 13(3): 401-406.

DOI：10.1007/s12541-012-0051-1

• Wedge stage
• Air bearings
• Straightness error
• Positioning error
• Compensation

We describe the development of a three-axis translation stage using wedges and its motion error compensation. The three-axis stage uses three wedges and is capable of translation in the vertical and longitudinal directions by controlling the horizontal separation of two opposing wedges. An independent linear translation stage is used to achieve displacement along the third axis. Compensation for straightness and positioning errors is achieved using the combined motion of the two opposing wedges and the motion of an independent linear stage. The straightness error in the vertical and horizontal directions through the longitudinal axis was 0.83 mu m and 1.65 mu m, respectively, before compensation and 0.22 mu m and 0.29 mu m with error compensation. The positioning error through the longitudinal axis was reduced from 8.96 mu m to 0.85 mu m.

• 出版日期2012-3
• 单位西北大学