Development of a Versatile Nanomanipulation System and Some of its Typical Applications

作者：Chang Ming^*; Lin Chia Hung; Deka Juti R; Lin Chung Po

来源：Journal of the Chinese Society of Mechanical Engineers, 2011, 32(1): 79-85.

• nanomanipulator
• scanning electron microscope
• nanomachining
• mechanical characterization

Nanomanipulation in space-limited environments requires small-sized nanomanipulators that are capable of producing nanometer positioning resolutions and large output forces. This investigation reports on the development of a multifunctional nanomanipulation system for nanomachining, nanofabrication and mechanical/electrical characterization of nanoscale objects inside a scanning electron microscope (SEM). The manipulator is made up of commercially available actuators and positioning stages. Several individual operating units have been combined to develop the nianipulation system where each unit has three linear stages and one rotational stage. Coarse positioning along three linear axes and a 360 rotational motion of the probe of each unit are provided by linear and rotational picomotors. The positioning system of each unit can be equipped with AFM/STM tips as end effectors for both manipulation and measurement, such as nanomachining on different substrates and nanomechanical characterization.

• 出版日期2011-2