摘要

The mechanical properties of a molding compound on a packaged integrated circuit (IC) were measured by spherical nanoindentation using a 50 mu m radius diamond tip. The molding compound is a heterogeneous material, consisting of assorted diameters of glass beads embedded in an epoxy. Statistical analysis was conducted to determine the representative volume element (RVE) size for a nanoindentation grid. Nanoindentation was made on the RVE to determine the effective viscoelastic properties. The relaxation functions were converted to temperature-dependent Young's modulus at a given strain rate at several elevated temperatures. The Young's modulus values at a given strain rate from nanoindentation were found to be in a good agreement with the corresponding data obtained from tensile samples at or below 90 degrees C. However, the values from nanoindentation were significantly lower than the data obtained from tensile samples when the temperature was near or higher than 110 degrees C, which is near the glass transition. The spatial distribution of the Young's modulus at a given strain rate was determined using nanoindentation with a Berkovich tip. The spatial variation of the Young's modulus at a given strain rate is due to the difference in nanoindentation sites (glass beads, epoxy or the interphase region). A graphical map made from an optical micrograph agrees reasonably well with the nanoindentation results.

  • 出版日期2017-9