NOx sensing properties of In2O3 nanoparticles prepared by metal organic chemical vapor deposition

作者：Wang Ch Y^*; Ali M; Kups Th; Roehlig C C; Cimalla V; Stauden Th; Ambacher O

来源：Sensors and Actuators B: Chemical , 2008, 130(2): 589-593.

DOI：10.1016/j.snb.2007.10.015

• MOCVD
• In2O3 nanoparticles
• NOx

In2O3 nanoparticles were deposited by low-temperature metal organic chemical vapor deposition. The response of 10-nm thick In2O3 particle containing layers to NOx and O-2 gases is investigated. The lowest detectable NO, concentration is similar to 200 ppb and the sensor performance is strongly dependent on the gas partial pressure as well as on the operating temperature. The sensor response towards 200 ppm of NOx is found to be above 10(4). Furthermore, the cross-sensitivity against O-2 is very low, demonstrating that the In2O3 nanoparticles are very suitable for the selective NO, detection.

• 出版日期2008-3-28