科研之友
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摘要
Thin films of Cu-Co alloy exhibiting excellent metallic luster were galvanostatically electrodeposited directly on Si substrates in a single citrate bath containing sulfates of the metal ions. The direct electrodeposition onto n-Si substrates eliminated a processing step, of depositing a conducting layer, if an insulator were to be used as a substrate. In addition, the use of silicon as a substrate is promising in integrating this inexpensive technique with semiconductor microelectronic device fabrication technology. The as-deposited films exhibited giant magnetoresistance (GMR) of 1% (T = 300 K, H = 10 kOe) and 5% (T = 10 K and H = 50 kOe). The annealed films showed an increase in GMR from 1 to 2.7%. The X-ray diffraction studies of as-deposited metastable films indicate solid solution like behavior following Vegard's law. However, our magnetic studies evidenced the presence of very fine nanograins of Co in these films. A systematic study of the effect of various processing parameters like deposition current density, bath temperature, and pH on the composition, structure, and microstructure of thin films was carried out to understand the electrodeposition process. Deposition current density and bath temperature have significant control over the composition and microstructure. The pH of the electrolyte seems to affect the topography most. Like physical vapor deposition (PVD), the electrodeposition process yields thin films via a nucleation-controlled growth mechanism. The superiority of the electrodeposition technique over the PVD technique is emphasized.
- 出版日期2002-7
